CVD Sistemleri

FirstNano® is CVD Equipment Corporation’s brand of R&D products

FirstNano®

FirstNano® is CVD Equipment Corporation’s research and development (R&D) brand of products. Various academic research centers, industry leaders, and government research labs worldwide have purchased the system and are employing it currently in their research.

CVD Equipment Corporation specializes in the manufacture of innovative, high quality process equipment suitable for the synthesis of a variety of thin films, carbon nanotubes, nanowires, LEDs, MEMS, nanostructures, nanomaterials, and other applications. The FirstNano® line of systems are applicable to nanoscale research that intersects cross-functional disciplines in semiconductor, applied physics, biotechnology, chemical, and mechanical engineering fields. FirstNano® branded process system models include; EasyTube®, EasyCrystal™, and EasyGraphene™.

In addition to our R&D process systems, we offer a complete line of gas storage, gas delivery, and gas abatement systems under the FirstNano® brand. These system models include; EasyGas™, EasyExhaust™, and EasyPanel™.

Our turnkey solutions allow you to configure a totally integrated system, including safety interlocks and interconnecting gas lines, to support your production projects safely and with peace of mind. Our engineering team can configure systems for specific applications and research development.

R&D SYSTEM
FirstNano manufactures configurable CVD systems for advanced reseach & development. Our equipment is used in universities and laboratories worldwide.

Learn more...
APPLICATIONS
EasyTube CVD system can be configured for a wide range of substrate size and process requirements.

Learn more...
CVD WINPRC
> Installed on all our systems
> Easy to read graphical user interface
> Includes:
>> Process control software
>> Recipe editing software
>> Log reader software
>> Configuration editing software

Learn more...
Collaboratıon Servıces
FirstNano offers collaboration services for your research grants, funding proposals or startup funding. We provide industry resources with the aim to support commercialization and job creation.
Contact us for a letter of collaboration.

Learn more...
Academıc Publıcatıons
FirstNano EasyTube systems are being used in breakthrough research and are featured in manyacademic publications.

Browse Publıcatıons

TURNKEY SOLUTIONS

DOWNLOAD FIRSTNANO PRODUCT CATALOG

FirstNano® provides a range of advanced research and development chemical vapor deposition process tools for universities, startups, and industry research laboratories.

The systems are designed to meet today’s safety standards for handling pyrophoric, corrosive, flammable, and toxic gases such as hydrogen, silane, germane, diborane, hydrogen chloride, and metal organic precursors. All our systems are designed with exhausted metal cabinet enclosures which contain the reactor, furnace, power control, gas distribution, and electrical systems. The systems are engineered with ease of access to all components for maintenance purposes.

FirstNano® systems are powered by CVDWinPrC™, our proprietary realtime instrument control, data logging, and process editing software suite. CVDWinPrC™, included as standard, is equivalent to the package included with our industry-ready production equipment. A web interface connection allows for remote training, software upgrades, and system troubleshooting.

FirstNano®’s ultra-high purity gas lines and delivery systems are manufactured by Stainless Design Concepts (SDC), a division of CVD Equipment Corporation. We take advantage of the SDC 4,000 ft2 clean room fabrication facility, with multiple high purity orbital welding stations. Our manufacturing is vertically integrated; we procure raw materials and deliver finished systems. Contact us to schedule a visit to our facility on Long Island, New York, where you can witness our quartz fabrication, extensive machine shop, and build/test facilities.

FirstNano® systems can be configured with a range of modules to meet the often unique requirements of the R&D environment. More information can be found by clicking on the system images below.

Proses Equipment

Gas Delivery

Exhaust Abatement

Daha fazla bilgi için tıklayınız.